Göran Stemme
机构: Professor, Micro and Nanosystems, KTH Royal Institute of Technology, Sweden
每年引用次数
引用次数
引用: 18,619
H-指数: 67
I10-指数 : 272
出版物: 639
Filter Structure for Sub-Micron Filtration Fabricated in Silicon
Kittilsland , Stemme
european solid state device research conference
1988
Comparison of thermal characteristics of novel RF MEMS dielectric-block phase shifter to conventional MEMS phase-shifter concepts
Oberhammer , Stemme , Somjit
european microwave conference 509 -512
2010
RF MEMS tuneable capacitors based on moveable sidewalls in 3D micromachined coplanar transmission lines
Stemme , Sterner , Oberhammer , Shah
asia-pacific microwave conference 1821 -1824
2010
Integrating MEMS and ICs
Andreas C. Fischer , Fredrik Forsberg , Martin Lapisa , Simon J. Bleiker
Microsystems & Nanoengineering 1 ( 1) 1 -16
285
2015
Performance optimization of multi-stage MEMS W-band dielectric-block phase-shifters
J. Oberhammer , N. Somjit , G. Stemme
european microwave integrated circuit conference 433 -436
1
2012
Phase error and nonlinearity investigation of millimeter-wave MEMS 7-stage dielectric-block phase shifters
J. Oberhammer , N. Somjit , G. Stemme
european microwave conference 519 -522
8
2009
Turbulence measurements using silicon based sensors
G. Stemme , L. Lofdahl , B. Johannson
ICAS, 27th Congress 1 193 -196
1990
Thin film crystal growth template removal: Application to stress reduction in lead zirconate titanate microstructures
P. Gkotsis , P. B. Kirby , F. Saharil , J. Oberhammer
Applied Physics Letters 91 ( 16) 163504
5
2007
Micro fluid sensors and actuators
G. Stemme
MHS'95. Proceedings of the Sixth International Symposium on Micro Machine and Human Science 45 -52
24
1995
High aspect ratio TSVs fabricated by magnetic self-assembly of gold-coated nickel wires
A. C. Fischer , S. J. Bleiker , N. Somjit , N. Roxhed
electronic components and technology conference 541 -547
7
2012
A balanced dual-diaphragm resonant pressure sensor in silicon
E. Stemme , G. Stemme
IEEE Transactions on Electron Devices 37 ( 3) 648 -653
43
1990
RF characterization of low-voltage high-isolation MEMS series switch based on a S-shaped film actuator
J. Oberhammer , B. Lindmark , G. Stemme
sbmo/mtt-s international microwave and optoelectronics conference 1 537 -540
8
2003
"Burst" technology with feedback-loop control for capacitive detection and electrostatic excitation of resonant silicon sensors
T. Corman , K. Noren , P. Enoksson , J. Melin
IEEE Transactions on Electron Devices 47 ( 11) 2228 -2235
15
2000
Full wafer integration of shape memory alloy microactuators using adhesive bonding
N. Sandstrom , S. Braun , G. Stemme , W. van der Wijngaart
international conference on solid state sensors actuators and microsystems 845 -848
4
2009
Room-temperature wafer-level hermetic sealing for liquid reservoirs by gold ring embossing
M. A. Lapisa , F. Niklaus , G. Stemme
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference 833 -836
13
2009
Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterials
M. Sterner , G. Stemme , J. Oberhammer
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference 1722 -1725
1
2009
Selective electrochemical release etching of eutectically bonded microstructures
H. Gradin , S. Braun , M. Sterner , G. Stemme
international conference on solid state sensors actuators and microsystems 743 -746
3
2009
Mechanically Bi-Stable In-Plane Switch with Dual-Stiffness Actuators
M. Sterner , N. Roxhed , G. Stemme , J. Oberhammer
international conference on solid state sensors actuators and microsystems 1401 -1404
4
2007
SNP analysis by allele-specific extension in a micromachined filter chamber
A. Ahmadian , A. Russom , H. Andersson , M. Uhlén
BioTechniques 32 ( 4) 748 -754
14
2002
Painless Drug Delivery Through Microneedle-Based Transdermal Patches Featuring Active Infusion
N. Roxhed , B. Samel , L. Nordquist , P. Griss
IEEE Transactions on Biomedical Engineering 55 ( 3) 1063 -1071
128
2008