Multi-sensors modules in SiGeMEMS technology

HAC Tilmans , Ann Witvrouw , Simone Severi , Philippe Helin
Smart systems integration 2013

2013
High-stability numerical algorithm for the simulation of deformable electrostatic MEMS devices

D Elata , X Rottenberg , W De Raedt , B Nauwelaers
NSTI Nanotech - 11th Annual Nanotechnology Conference and Trade Show 3 ( 2008) 501 -504

1
2008
Boosted RF-MEMS capacitive shunt switches

X Rottenberg , W De Raedt , Bart Nauwelaers , H.A.C Tilmans
Workshop on Semiconductor Sensor and Actuator Technology (3rd SeSens) 667 -671

2
2002
Über schmale Brücken muss man gehen - Neuartige kapazitive HF-MEMS-Schalte

X Rottenberg , W De Raedt , Bart Nauwelaers , H.A.C Tilmans
Electronic Embedded Systeme 3 ( 4) 33 -35

2003
RF-MEMS capacitive switches

X Rottenberg , W De Raedt , Bart Nauwelaers , H.A.C Tilmans
URSI Forum 2002

2002
RF-MEMS metal contact capacitive switches

X Rottenberg , Robert Pierre Mertens , Bart Nauwelaers , P Fiorini
4th Round Table on Micro/Nano Technologies for Space 1 -12

2003
Improved MEMS based shunt switches for telecom applications

X Rottenberg , W De Raedt , Bart Nauwelaers , M.Y Ghannam
ISWSN'03

2003
Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)

Rachid Haouari , Roelof Jansen , Veronique Rochus , B Figeys
TechConnect Briefs 4 ( 2017) 59 -63

2017
Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators

G B Torri , N M A Janssen , Z Zeng , X Rottenberg
Journal of Micromechanics and Microengineering 24 ( 8) 085014

6
2014
Modal analysis based equivalent circuit model and its verification for a single cMUT cell

S P Mao , X Rottenberg , V Rochus , P Czarnecki
Journal of Micromechanics and Microengineering 27 ( 3) 035001

4
2017
Fast analytical model of MZI micro-opto-mechanical pressure sensor

V Rochus , R Jansen , J Goyvaerts , P Neutens
Journal of Micromechanics and Microengineering 28 ( 6) 064003

8
2018
An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology

X Rottenberg , S Brebels , P Ekkels , P Czarnecki
Journal of Micromechanics and Microengineering 17 ( 7) S204 -S210

38
2007
Evaluation of platinum as a structural thin film material for RF-MEMS devices

P Ekkels , X Rottenberg , R Puers , H A C Tilmans
Journal of Micromechanics and Microengineering 19 ( 6) 065010

39
2009
RF-power: driver for electrostatic RF-MEMS devices

X Rottenberg , S Brebels , W De Raedt , B Nauwelaers
Journal of Micromechanics and Microengineering 14 ( 9) 65 -68

25
2004
Filter-through device: a distributed RF-MEMS capacitive series switch

X Rottenberg , R P Mertens , B Nauwelaers , W De Raedt
Journal of Micromechanics and Microengineering 15 ( 7)

9
2005
Design considerations: From a Micro-Opto-Mechanical Pressure Sensor to a Micro-Opto-Mechanical Microphone

R Haouari , R Jansen , V Rochus , B Figeys
MEMS & NEMS Devices, Modeling & Applications symposium 2017

3
2017
Millimetre-wave switch based on air-gap-MEMs variable capacitors

Amin Enayati , X Rottenberg , P Ekkels , Walter De Raedt
GigaHz Symposium, Date: 2010/03/09-2010/03/10, Location: Lund, Sweden

2010
Adiabatically Bent Waveguides on Silicon Nitride Photonics for Compact and Dense Footprints

JH Song , TD Kongnyuy , A Stassen , V Mukund
IEEE Photonics Technology Letters 28 ( 20) 2164 -2167

5
2016
Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

A Marinins , J Kjellman , C Caer , T David
2021 Conference on Lasers and Electro-Optics (CLEO) 1 -2

2
2021
Lumped Element Model for an Optomechanical Ultrasound Sensor

C Pieters , R Haouri , FR Lamberti , G Keulemans
2023 IEEE Photonics Conference (IPC) 1 -2

2023