Clifford L. Henderson
机构: Dean of Engineering, Professor of Chemical and Biological Engineering, The University of Alabama
每年引用次数
引用次数
引用: 4,623
H-指数: 33
I10-指数 : 121
出版物: 340
Influence of optical nonlinearities of the photoresist on the photolithographic process : applications
C. G. Willson , C. L. Henderson , W. Henke , A. Erdmann
Emerging lithographic technologies. Conference 114 -124
1997
Simulation study of the effect of molar mass dispersity on domain interfacial roughness in lamellae forming block copolymers for directed self-assembly.
Andrew J Peters , Richard A Lawson , Benjamin D Nation , Peter J Ludovice
Nanotechnology 26 ( 38) 385301 -385301
6
2015
Self-assembly for three-dimensional integration of functional electrical components
Andrew H Cannon , Yueming Hua , Clifford L Henderson , William P King
Journal of Micromechanics and Microengineering 15 ( 11) 2172 -2178
18
2005
Fabrication of microchannels using polycarbonates as sacrificial materials
Hollie A Reed , Celesta E White , Vikram Rao , Sue Ann Bidstrup Allen
Journal of Micromechanics and Microengineering 11 ( 6) 733 -737
98
2001
Novel Anionic Photoacid Generators (PAGs) and Photoresists for sub 50 nm Patterning by EUVL and EBL
Mingxing Wang , Cheng-Tsung Lee , Clifford L Henderson , Wang Yueh
MRS Proceedings 961 ( 1) 1 -7
4
2006
New Photodefinable Dielectric Polymer Thin Film Materials for Microelectronics and Optoelectronics Based on Novel Hexafluoralcohol Substituted Monomers
Michael Romeo , Clifford L Henderson
Smpte Journal
2006
High charge carrier mobility, low bandgap DA benzothiadiazole oligo-thiophene based polymeric semiconductors
Boyi Fu , Jose Baltazar , Zhaokang Hu , An-Ting Chien
Nanoscale thermal lithography by local polymer decomposition using a heated atomic force microscope cantilever tip
Yueming Hua , Shubham Saxena , Clifford L Henderson , William P King
Journal of Micro/Nanolithography, MEMS and MOEMS 6 ( 2) 023012 -023012
24
2007
Direct write nanolithography using heated tip
William P King , Clifford L Henderson
18
2008
Microsystems manufacturing via embossing of photodefinable thermally sacrificial materials
Celesta E White , Travis Anderson , Clifford L Henderson , Harry D Rowland
Emerging Lithographic Technologies VIII 5374 361 -370
7
2004
Nanolithography in thermally sacrificial polymers using nanoscale thermal probes
Yueming Hua , Shubham Saxena , William P King , Clifford L Henderson
Advances in Resist Technology and Processing XXIII 6153 485 -491
3
2006
Nanoelectronics writing using heated probe tips
William P King , Clifford L Henderson
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 231
2006
Recent Advances in Nanoscale Thermal Lithography Using Heated Atomic Force Microscope Cantilevers and Cantilever Arrays
Yueming Hua , Shubham Saxena , William P King , Clifford L Henderson
The 2006 Annual Meeting
2006
Thermochemical nanolithography components, systems, and methods
Elisa Riedo , Seth R Marder , Walt A De Heer , Robert J Szoskiewicz
8
2013
Supporting Information for “Production of heavily n-and p-doped CVD graphene with solution-processed redox-active metal–organic species”
Sergio A Paniagua , Jose Baltazar , Hossein Sojoudi , Swagat K Mohapatra
Coarse grained molecular dynamics model of block copolymer directed self-assembly
Richard A Lawson , Andrew J Peters , Peter J Ludovice , Clifford L Henderson
Alternative Lithographic Technologies V 8680 422 -432
40
2013
Effects of block copolymer polydispersity and xN on pattern line edge roughness and line width roughness from directed self-assembly of diblock copolymers
Andrew J Peters , Richard A Lawson , Peter J Ludovice , Clifford L Henderson
Alternative Lithographic Technologies V 8680 408 -415
18
2013
Development of realistic potentials for the simulation of directed self-assembly of PS-PMMA di-block copolymers
Richard A Lawson , Peter J Ludovice , Clifford L Henderson
Alternative Lithographic Technologies III 7970 119 -128
15
2011
Coarse-grained molecular dynamics modeling of the kinetics of lamellar BCP defect annealing
Andrew J Peters , Richard A Lawson , Benjamin D Nation , Peter J Ludovice
Alternative Lithographic Technologies VII 9423 472 -486
8
2015
Effect of χN and underlayer composition on self-assembly of thins films of block copolymers with energy asymmetric blocks
Richard A Lawson , Andrew J Peters , Benjamin D Nation , Peter J Ludovice
Alternative Lithographic Technologies VII 9423 378 -395
5
2015