Electro-negative plasma diagnostic using pulse bias hairpin probe

Karkari , Sirse , Turner
international conference on plasma science

2012
Time-resolved electron density and OES measurements for studying the surface loss rates of H and Cl atoms in a Cl$_2$-H$_2$ ICP plasma

Gurusharan Gogna , Shantanu Karkari , Stephane Guilet , Nishant Sirse
Bulletin of the American Physical Society

2010
Inductively-coupled plasmas in pure chlorine: comparison experiments/HPEM

Nishant Sirse , Pascal Chabert , Jean-Paul Booth , Yasmina Azamoum
APS

2012
2011
Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Nishant Sirse , Pascal Chabert , Mickaël Foucher , Jean-Paul Booth
Journées d’Echange du Réseau des Technologies des Plasmas Froids

2013
Dynamics of Cl 2 inductively-coupled plasmas: Role of electronic and vibrational excitation

M.J. Kushner , A. Surzhykov , Nishant Sirse , Jean-Paul Booth
FLTPD

2013
Absolute Cl and Cl 2 densities in a Cl 2 ICP determined by TALIF with a new calibration method

Jean-Paul Booth , Yasmina Azamoum , Nishant Sirse , Pascal Chabert
UK TPW

2011
Inductively-coupled plasmas in Cl 2 and O 2 : Comparing HPEM with advanced diagnostic measurements

M.J. Kushner , Daniil Marinov , Nishant Sirse , Pascal Chabert
Quantumol Workshop -Linking Simulation with Experiment

2015
Recombination coefficient of Cl atoms on Al 2 O 3 walls determined byTwo-Photon Laser-Induced Fluorescence

Jean-Paul Booth , Yasmina Azamoum , Nishant Sirse , Pascal Chabert
ICPIG

2011
Recombination coefficients of Cl atoms on Al 2 O 3 walls determined by TALIF

Jean-Paul Booth , Yasmina Azamoum , Nishant Sirse , Pascal Chabert
Plasma Etch and Strip for Microelectronics (PESM)

2011
Ozone production in O 2 plasma at low pressure: evaluation of surface and gas phase mechanisms

Daniil Marinov , V. Guerra , Nishant Sirse , Jean-Paul Booth
IPS

2012
High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Nishant Sirse , Miles M. Turner , Sarveshwar Sharma
Plasma Sources Science and Technology 29 ( 11) 114001

2020
Kinetics of highly vibrationally excited O2(X) molecules in inductively-coupled oxygen plasmas

Adriana Annušová , Daniil Marinov , Jean-Paul Booth , Nishant Sirse
Plasma Sources Science and Technology 27 ( 4) 045006

21
2018
Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency

Sarveshwar Sharma , Nishant Sirse , Animesh Kuley , Miles M Turner
Plasma Sources Science and Technology 29 ( 4) 045003

3
2020
Characteristics of silicon nitride deposited by VHF (162 MHz)-plasma enhanced chemical vapor deposition using a multi-tile push–pull plasma source

Ki Seok Kim , Nishant Sirse , Ki Hyun Kim , Albert Rogers Ellingboe
Journal of Physics D 49 ( 39) 395201

15
2016
Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges

Sarveshwar Sharma , Nishant Sirse , Abhijit Sen , Miles M. Turner
Physics of Plasmas 26 ( 10) 103508

8
2019
Electron density modulation in a pulsed dual-frequency (2/13.56 MHz) dual-antenna inductively coupled plasma discharge

Nishant Sirse , Anurag Mishra , Geun Y. Yeom , Albert R. Ellingboe
Journal of Vacuum Science and Technology 34 ( 5) 051302

9
2016