Si/SiGe HBTsforMillimeter-wave BiCMOSTechnologies

G. Dambrine , N. Zerounian , E. Laskin , B. Geynet

10
2008
Low temperature performance of self-aligned,etched polysilicon emitter pseudo-HBTs

G Giroult-Matlakowski , H Bousetta , B LeTron , A Chantre

1994
Thermal and chemical loading effects in non selective Si/SiGe epitaxy

C Fellous , F Romagna , D Dutartre
Materials Science and Engineering B-advanced Functional Solid-state Materials 89 ( 1) 323 -327

12
2002
Low-temperature selective epitaxy of silicon with chlorinated chemistry by RTCVD

P Ribot , D Dutartre
Materials Science and Engineering B-advanced Functional Solid-state Materials 89 ( 1) 306 -309

14
2002
A 70-GHz-fT double-polysilicon SiGe HBT using a non selective epitaxial growth

H Baudry , C Fellous , B Martinet , F Romagna
Materials Science and Engineering B-advanced Functional Solid-state Materials 89 ( 1) 21 -25

3
2002
Selective SiGe epitaxy by rtcvd for new device architectures

P Ribot , S Monfray , T Skotnicki , D Dutartre
Materials Science and Engineering B-advanced Functional Solid-state Materials 89 ( 1) 125 -128

10
2002
Kinetic Monte Carlo simulations of Ge--Sb--Te thin film crystallization

A Portavoce , G Roland , J Remondina , M Descoins
Nanotechnology 33 ( 29) 295601

1
2022
BEOL process effects on ePCM reliability

A Redaelli , A Gandolfo , G Samanni , E Gomiero
IEEE Journal of the Electron Devices Society 10 563 -568

4
2022
Simultaneous optical measurement of Ge content and carbon doping in strained epitaxial SiGe films

S Morris , D Le Cunff , D Ristoiu , V Vachellerie
Journal of Vacuum Science & Technology B 23 ( 5) 2249 -2253

1
2005
Characterization of Si1−xGex/Si (100) heterostructures by photoluminescence and admittance spectroscopy

A Souifi , G Bremond , T Benyattou , G Guillot
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 10 ( 4) 2002 -2007

27
1992
Photonic devices with reduced In, Ga and Sb content

T Baron , Ml Touraton , T Cerba , M Martin
EMRS FALL MEETING

2019
Prospects for SiGeC HBT BiCMOS on thin-film SOI

Alain Chantre , G Avenier , L Boissonnet , G Borot
Meeting Abstracts ( 31) 1440 -1440

2
2006
A selective epitaxy collector module for high-speed Si/SiGe: C HBTs

B Geynet , P Chevalier , F Brossard , B Vandelle
Solid-state electronics 53 ( 8) 873 -876

10
2009
Si1-xGex/Si selective etch with HCl for thin Si-channel transistors integration

N Loubet , S Denorme , A Pouydebasque , F Leverd
International conference on solid state devices and materials, proceedings 716 -7

8
2007