引用次数
引用: 7,108
H-指数: 48
I10-指数 : 136
出版物: 449
Laser Studies of Species Involved in Plasma Etching Processes.
Jean Paul Booth
PhDT
1988
Electron transport coefficients in mixtures of CF 4 and CF 2 radicals
Željka D Nikitović , Vladimir D Stojanović , Jean Paul Booth , Zoran Lj Petrović
Plasma Sources Science and Technology 18 ( 3) 035008
15
2009
Gas temperature gradients in a CF4 inductive discharge
Hana Abada , Pascal Chabert , Jean Paul Booth , Jérôme Robiche
Journal of Applied Physics 92 ( 8) 4223 -4230
47
2002
F-detection by CRDS in a dual-frequency capacitive plasma in Ar/C4F8/O2
Garrett A Curley , Corr Cormac , Tomas Foldes , Jean Paul Booth
2005
F$^-$ detection by CRDS in a dual-frequency capacitive plasma in Ar/C$_4$F$_8$/O$_2$
Garrett Curley , Cormac Corr , Jean-Paul Booth
Bulletin of the American Physical Society
2005
Systems for automatically characterizing a plasma
Douglas Keil , Christopher Thorgrimsson , Jean-Paul Booth
1
2014
Methods and apparatus for normalizing optical emission spectra
Vijayakumar C. Venugopal , Eric Pape , Jean-Paul Booth
10
2012
Charged Particle Dynamics in a Dual-Frequency Capacitively Coupled Fluorocarbon Plasma
Pascal Chabert , Garrett Curley , Dragana Mari 'c , Jean-Paul Booth
Bulletin of the American Physical Society
2006
Time-resolved electron density and OES measurements for studying the surface loss rates of H and Cl atoms in a Cl$_2$-H$_2$ ICP plasma
Gurusharan Gogna , Shantanu Karkari , Stephane Guilet , Nishant Sirse
Bulletin of the American Physical Society
2010
Inductively-coupled plasmas in pure Cl, Oand mixtures: measurements of atoms, Cl$_{\mathrm{x}}$O$_{\mathrm{y}}$and electron densities
Pascal Chabert , Micka "el Foucher , Jean-Paul Booth , Emile Carbone
Bulletin of the American Physical Society
2014
Control of Microcrystalline Silicon Deposition by RF Waveform Tailoring
Jean-Charles Vanel , Thomas Verbeke , Erik Johnson , Jean-Paul Booth
Bulletin of the American Physical Society
2010
Vibrational excitation in O$_{\mathrm{\mathbf{2}}}$\textbf{ and Cl}$_{\mathrm{\mathbf{2}}}$\textbf{ inductively-coupled plasmas and DC discharges}
Daniil Marinov , Adriana Annusova , Vasco Guerra , Mickael Foucher
Bulletin of the American Physical Society
2016
Electron densities and temperatures in a Cl$_{2}$/Ar ICP
Pascal Chabert , Jean-Paul Booth , Sophie Bouchoule , Lina Gatilova
Bulletin of the American Physical Society
2010
Charged species' densities and fluxes in a dual-frequency capacitive plasma
Garrett Curley , Cormac Corr , Jean-Paul Booth , Sebastien Dine
Bulletin of the American Physical Society
1
2005
Plasma density determination from surface-wave transmission spectra
Garrett Curley , Sebastien Dine , Cormac Corr , Jean-Paul Booth
Bulletin of the American Physical Society
2005
Modelling the influence of neutral gas heating mechanisms on particle densities in inductively coupled chlorine discharges
Mark Kushner , Daniil Marinov , Pascal Chabert , Vasco Guerra
Bulletin of the American Physical Society
2015
Progress on Voltage Waveform Tailoring for plasmas: From science to process, from lab to fab
Sebastien Dine , Erik Johnson , Jean-Paul Booth
Bulletin of the American Physical Society
2017
Vibrational excitation and temperature evolution in a pulsed CO2 discharge
Cyril Drag , Vasco Guerra , Richard Engeln , Jean-Paul Booth
Bulletin of the American Physical Society
2017
Inductively-coupled plasmas in pure Cl, Oand mixtures: measurements of atoms, Cl x O y and electron densities
Mickaël Foucher , Jean-Paul Booth , Pascal Chabert , LPP-Plasmas froids Team
APS
2014
Negative Ions in Dual-Frequency Capacitively Coupled Fluorocarbon Plasmas
Jean-Paul Booth
APS
2006