Reactions on a Plasma Reactor Wall, Studied by a New Spinning Wall Method
Joydeep Guha , Vincent Donnelly , Peter Kurunczi
Meeting Abstracts ( 23) 800 -800
2006
Generation of Suprathermal Electrons in Argon Plasmas Sustained by Surface-Waves
Luc Stafford , Joelle Margot , Vincent Donnelly , Olivier Boudreault
Bulletin of the American Physical Society
2010
Heterogeneous Reactions in Processing Plasmas
Vincent Donnelly
Bulletin of the American Physical Society
2010
Fundamental Studies of Pulsed Processing Plasmas
Mark Kushner , Steven Shannon , Vincent Donnelly , Tianyu Ma
Bulletin of the American Physical Society
2017
Quantitative plasma diagnostics by electron impact induced emission from trace rare gases
Vincent Donnelly
APS 46 ( 3)
2001
Diagnostics of ballistic electrons in a DC/RF hybrid capacitively coupled plasma reactor
Demetre Economou , Lee Chen , Radha Sundararajan , Vincent Donnelly
APS
2008
Diagnostics of a High Pressure Helium Microplasma
Ivanka Koleva , Demetre Economou , Vincent Donnelly , Qiang Wang
APS
2004
TRG-OES, MWI, and Langmuir Probe Studies of Electro-Negative Pulsed Plasmas
Mikhail Malyshev , Vincent Donnelly
APS Division of Plasma Physics Meeting Abstracts
1998
A low temperature plasma science program: Discovery science for societal benefit
Mark J Kushner , Igor Adamovich , Eray Aydil , Scott D Baalrud
White Paper to the
5
2014
Synergistic Behavior of a Dual Tandem Plasma Source
Lei Liu , Weiye Zhu , Shyam Sridhar , Vincent Donnelly
APS Annual Gaseous Electronics Meeting Abstracts KW1. 003 -KW1. 003
2013
A parametric study of DC-RF Penning-type plasma discharge
Yevgeny Raitses , Pierre Baele , Vincent Donnelly
APS Annual Gaseous Electronics Meeting Abstracts QRP1. 035 -QRP1. 035
2
2011
Effect of anomalous electron cross-field transport on electron energy distribution function in a DC-RF magnetized plasma discharge
Yevgeny Raitses , Vincent Donnelly , Igor Kaganovich , Valery Godyak
APS Annual Gaseous Electronics Meeting Abstracts QR3. 004 -QR3. 004
2013
Dynamics of Plasma Atomic Layer Etching: Molecular Dynamics Simulations and Optical Emission Spectroscopy
David Graves , Joseph Vella , Quinzen Hao , Vincent Donnelly
APS Annual Gaseous Electronics Meeting Abstracts FT1. 001 -FT1. 001
2023
In-plasma, vacuum ultraviolet photon-assisted etching of silicon
Vincent Donnelly , Linfeng Du , Emilia Hirsch , Demetre Economou
APS Annual Gaseous Electronics Meeting Abstracts PR22. 002 -PR22. 002
2021
Will Allis Prize Talk: Plasma Etching of Silicon: 50 Years and Still Surprises
Vincent Donnelly
Bulletin of the American Physical Society
2024
Atomic Layer Etching of Silicon in HBr-Containing Plasmas
Vincent Donnelly , Qinzhen Hao , Pilbum Kim , Song-Yung Kang
APS Annual Gaseous Electronics Meeting Abstracts FT1. 004 -FT1. 004
2023
Glow discharge optical spectroscopy for sputter-depth profile analysis in plasmas
Priyanka Arora , Junghyun Cho , Vincent Donnelly
APS Annual Gaseous Electronics Meeting Abstracts HW2. 003 -HW2. 003
2019
Radial distribution of air species diffusing into an RF Helium atmospheric pressure plasma jet
Tam Nguyen , Peng Lin , Vincent Donnelly , Demetre Economou
APS Annual Gaseous Electronics Meeting Abstracts QR3. 002 -QR3. 002
2019
Simulation of atmospheric pressure plasma jet with coaxial shielding gas
Peng Lin , Tam Nguyen , Vincent Donnelly , Demetre Economou
APS Annual Gaseous Electronics Meeting Abstracts FT1. 042 -FT1. 042
2019
Photo-assisted etching of silicon in halogen-containing plasmas
Shyam Sridhar , Weiye Zhu , Lei Liu , Demetre Economou
APS Annual Gaseous Electronics Meeting Abstracts LW1. 002 -LW1. 002
2013