Ultra-sensitive refractive index gas sensor with functionalized silicon nitride photonic circuits

作者: Bernhard Lendl , Haolan Zhao , Bettina Baumgartner , Roel Baets , Giuseppe Antonacci

DOI:

关键词: InterferometryDetection limitSilicon nitrideMaterials scienceElectronic circuitPhotonic integrated circuitPhotonicsOptoelectronicsMesoporous silicaRefractive index

摘要: … In medical diagnostics, for example, recent studies have suggested the use of gas sensors … The results show clear visible signal responses of our gas sensor even at low (<1 ppm) gas …

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