Versatile Silicon Nitride and Alumina Integrated Photonic Platforms for the Ultraviolet to Short-Wave Infrared
作者： Cheryl Sorace-Agaskar , Dave Kharas , Siva Yegnanarayanan , Ryan T. Maxson , Gavin N. West
DOI: 10.1109/JSTQE.2019.2904443
关键词: Ultraviolet 、 Infrared 、 Silicon nitride 、 Biophotonics 、 Optoelectronics 、 Photonics 、 Optical filter 、 CMOS 、 Materials science 、 Silicon
摘要: … The alumina waveguide fabrication process is summarized … set of silicon nitride and alumina integrated photonic platforms … These platforms are all compatible with CMOS foundries, and …
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