Method and device for processing inside of transparent material

作者: Ya Cheng , Katsumi Midorikawa , Koji Sugioka

DOI:

关键词: Laser lightFocus (optics)Beam (structure)FemtosecondMaterials scienceOptoelectronicsOptics

摘要: A shape with a substantially perfect sphere, or cross-sectional circle in direction parallel to an advance of femtosecond laser light beam, is obtained as processed such modified worked shape. Rays femtosocond (L1, L2) are entered into lenses (16, 20), respectively, and the rays focused inside transparent material (100) by that each optical axes has predetermined angle. The focus positions superposed processed.