Off-line learning based adaptive dispatching rule for semiconductor wafer fabrication facility
作者： L. Li , H. Xu
DOI: 10.1109/COASE.2013.6653974
关键词: Off line 、 Workflow 、 Semiconductor wafer fabrication 、 Scheduling (production processes) 、 Selection algorithm 、 Engineering 、 Real-time computing 、 Learning based 、 Weighting 、 Semiconductor device fabrication
摘要: Uncertainties in semiconductor manufacturing fabrication facilities (FABs) requires scheduling methods adaptive to real-time environments. This paper presents an off-line learning based dispatching rule (ADR) whose parameters are tuned dynamically with information relevant scheduling. First, we introduce the framework of ADR composed dynamic dispatching, machine, and simulation model. Secondly, discuss workflow detail. Thirdly, use immune cloning selection algorithm (ICSA) find relations between weighting status adapt these environment. Finally, a real fab model is used demonstrate proposed method. The results show that changing tracking production over time more robust than constant ones, improve movements WIP by about 2%.
sci-hub.se 参考文章(7)
Li Li, Fei Qiao, Hua Jiang, Qidi Wu, The research on dispatching rule for improving on-time delivery for semiconductor wafer fab international conference on control, automation, robotics and vision. ,vol. 1, pp. 494- 498 ,(2004) , 10.1109/ICARCV.2004.1468875
Hyeung-Sik Min, Yuehwern Yih, Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system International Journal of Production Research. ,vol. 41, pp. 3921- 3941 ,(2003) , 10.1080/0020754031000118099
H. Eivazy, M. Rabbani, An efficient dispatching method in the hybrid Make-to-Stock/Make-to-Order semiconductor manufacturing systems annual conference on computers. pp. 1763- 1768 ,(2009) , 10.1109/ICCIE.2009.5223916
K.-J. Wang *, J. C. Chen, Y.-S. Lin, A hybrid knowledge discovery model using decision tree and neural network for selecting dispatching rules of a semiconductor final testing factory Production Planning & Control. ,vol. 16, pp. 665- 680 ,(2005) , 10.1080/09537280500213757
David M. Chiang, Ruey-Shan Guo, Fan-Yun Pai, Improved customer satisfaction with a hybrid dispatching rule in semiconductor back-end factories International Journal of Production Research. ,vol. 46, pp. 4903- 4923 ,(2008) , 10.1080/00207540701324168
Y.F. Lee, Z.B. Jiang, H.R. Liu, Multiple-objective scheduling and real-time dispatching for the semiconductor manufacturing system Computers & Operations Research. ,vol. 36, pp. 866- 884 ,(2009) , 10.1016/J.COR.2007.11.006
Huai Zhang, Zhibin Jiang, Chengtao Guo, Simulation-based optimization of dispatching rules for semiconductor wafer fabrication system scheduling by the response surface methodology The International Journal of Advanced Manufacturing Technology. ,vol. 41, pp. 110- 121 ,(2009) , 10.1007/S00170-008-1462-0