Phonon scattering in silicon films with thickness of order 100 nm

作者: Y. S. Ju , K. E. Goodson

DOI: 10.1063/1.123994

关键词: Silicon on insulatorScatteringThermal conductionMaterials scienceMonocrystalline siliconOptoelectronicsPhonon scatteringSiliconPhononCondensed matter physicsThermal conductivity

摘要: … For the longitudinal phonons, the phonon–phonon scattering rate is assumed to exhibit a … The exponent m, which governs the frequency dependence of the phonon–phonon scattering …

参考文章(19)
Y. S. Touloukian, Thermophysical Properties of Matter ,(1995)
G Chen, M Neagu, T Borca-Tasciuc, Thermal conductivity and heat transfer in superlattices Applied Physics Letters. ,vol. 71, pp. 2761- 2763 ,(1997) , 10.1063/1.120126
T. H. Geballe, G. W. Hull, Isotopic and Other Types of Thermal Resistance in Germanium Physical Review. ,vol. 110, pp. 773- 775 ,(1958) , 10.1103/PHYSREV.110.773
S.-M. Lee, David G. Cahill, Rama Venkatasubramanian, Thermal conductivity of Si–Ge superlattices Applied Physics Letters. ,vol. 70, pp. 2957- 2959 ,(1997) , 10.1063/1.118755
B.T. Boiko, A.T. Pugachev, V.M. Bratsychin, Method for the determination of the thermophysical properties of evaporated thin films Thin Solid Films. ,vol. 17, pp. 157- 161 ,(1973) , 10.1016/0040-6090(73)90124-7
E.H. Sondheimer, The mean free path of electrons in metals Advances in Physics. ,vol. 50, pp. 499- 537 ,(1952) , 10.1080/00018735200101151
David G. Cahill, M. Katiyar, J. R. Abelson, Thermal conductivity of a -Si:H thin films Physical Review B. ,vol. 50, pp. 6077- 6081 ,(1994) , 10.1103/PHYSREVB.50.6077
Baxter H. Armstrong, N processes, the relaxation-time approximation, and lattice thermal conductivity. Physical Review B. ,vol. 32, pp. 3381- 3390 ,(1985) , 10.1103/PHYSREVB.32.3381
M. G. Holland, Analysis of Lattice Thermal Conductivity Physical Review. ,vol. 132, pp. 2461- 2471 ,(1963) , 10.1103/PHYSREV.132.2461