Showerhead assembly and components thereof
作者： Eric Shero , Carl White , Jereld Lee Winkler , David Marquardt
DOI:
关键词: Chemistry 、 Nanotechnology 、 Mechanical engineering 、 Flow (psychology)
摘要: Showerhead assemblies, gas distribution plates, and systems including the same are disclosed. Exemplary showerhead assemblies include a plate. plates apertures designed to direct flow of reduce stagnation on surfaces plates.
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