Method of fabricating a polarizing layer on an interface
作者： Janice H. Nickel
DOI:
关键词: Gas cluster ion beam 、 Cluster (physics) 、 Ion 、 Materials science 、 Analytical chemistry 、 Interface (computing) 、 Layer (electronics) 、 Beam (structure) 、 Composite number 、 Optoelectronics
摘要: A method of fabricating a polarizing layer using gas cluster ion beam apparatus (GCIB) is disclosed. The includes generating metal-organic that compound. compound material, such as iron Fe, Co, or CoFe, for example. and carrier are combined to form composite supplied the GCIB. GCIB processes ions include material. irradiates an interface surface material at least portion remains in contact with on surface.
google.de 参考文章(23)
Isao Yamada, High energy ultraviolet laser reflector grown on a single crystalline substrate ,(1989)
James A. Greer, Matthew C. Gwinn, Lester G. Crawford, James G. Bachand, Bruce K. Libby, Isao Yamada, Richard P. Torti, Gas cluster ion beam smoother apparatus ,(2000)
David B. Fenner, Interface control for film deposition by gas-cluster ion-beam processing ,(2001)
David B. Fenner, Adaptive GCIB for smoothing surfaces ,(1999)
Allen R. Kirkpatrick, Jerald P. Dykstra, David J. Mount, Wesley J. Skinner, Enhanced etching/smoothing of dielectric surfaces ,(2000)
Makoto Akizuki, Jiro Matsuo, Atsumasa Doi, Isao Yamada, Satoru Ogasawara, Mitsuaki Harada, Method for forming gas cluster and method for forming thin film ,(2003)
Allen R Kirkpatrick, Wesley J Skinner, Method and apparatus for smoothing thin conductive films by gas cluster ion beam ,(2000)
James A. Greer, System and method for adjusting the properties of a device by GCIB processing ,(2001)
Jiro Matsuo, Teruyuki Kitagawa, Allen Kirkpatrick, Isao Yamada, Method for forming carbonaceous hard film ,(1999)
Jerald P. Dykstra, Gas cluster ion beam size diagnostics and workpiece processing ,(2001)