Contact microscopy with a soft X-ray laser

作者: C. H. Skinner , D. S. DiCicco , D. Kim , R. J. Rosser , S. Suckewer

DOI: 10.1111/J.1365-2818.1990.TB03018.X

关键词: PhysicsMicroscopeMicroscopyPhotoresistImage resolutionScanning electron microscopeLaserElectron microscopeResolution (electron density)Optics

摘要: A soft x-ray laser of output energy 1-3 mJ at 19.2 nm has been used to record high resolution images biological specimens. The contact were recorded on photoresist which was later viewed in a scanning electron microscope. We also present Composite Optical X- ray Laser Microscope ''COXRALM'' novel design. 14 refs., 8 figs., 1 tab.

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