Electroless copper deposition process having faster plating rates

作者: John F. McCormack , Francis J. Nuzzi

DOI:

关键词: PlatingNitrogenInorganic chemistryCopper depositionCopperDelocalized electronReducing agentChelationSulfurChemistry

摘要: There is provided a method for increasing the useful effective plating rate of an electroless copper deposition solution which comprises ion, complexing agent reducing and pH adjustor characterized by first increases passes through peak then decreases as function above 10. In accordance with this invention, such may be significantly increased operation thereof in presence accelerating or depolarizing at to achieve without same pH. The agents use herein include compounds containing delocalized pi-bond, heterocyclic aromatic nitrogen sulfur compounds, non-aromatic having least one amines.

参考文章(11)
A Moienaar, F Geertsema, H Jonker, Electroless deposition of ductile copper ,(1972)
Rudolph J Zeblisky, Jr Frederick W Schneble, John F Mccormack, Williamson John Duff, Electroless copper plating ,(1963)
Jan Boven, Den Meerakker Johannes E.A.M. Van, Arian Molenaar, Bath for the electroless deposition of ductile copper ,(1973)
Okuno Giichi, Kondo Goro, Torigai Eiichi, Method and bath for chemically plating copper ,(1964)
Masahiro Oita, Katsuhiko Honjo, Hyogo Hirohata, Method for electroless copper plating ,(1975)
H. Jonker, L.K.H. Van Beek, C.J. Dippel, C.J. Dippel, C.J.G.F. Janssen, A. Molenaar, E.J. Spiertz, Principles of PD Recording Systems and their Use in Photofabrication The Imaging Science Journal. ,vol. 19, pp. 96- 105 ,(1971) , 10.1080/00223638.1971.11737589