Indium-tin oxide thin films prepared by chemical vapor deposition
作者： Toshiro Maruyama , Kunihiro Fukui
DOI: 10.1063/1.349189
关键词: Tin 、 Analytical chemistry 、 Carbon film 、 Transparent conducting film 、 Indium tin oxide 、 Thin film 、 Indium acetylacetonate 、 Mineralogy 、 Chemistry 、 Chemical vapor deposition 、 Combustion chemical vapor deposition
摘要: … Transparent conductive indium-tin oxide thin films were prepared by an atmospheric-… chemical vapor deposition method. The raw materials were indium acetylacetonate and tin (II) …
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