Radiation detector and x-ray ct system with this detector
作者： Yasuo Saito , 博明 宮崎 , 泰男 斉藤 , Hiroaki Miyazaki
DOI:
关键词: Detector 、 Silicon 、 Photodiode 、 Optics 、 Scintillator 、 Irradiation 、 Optoelectronics 、 Materials science 、 Visible spectrum 、 Substrate (electronics) 、 Particle detector
摘要: PURPOSE:To obtain an X-ray data over a wide range through single irradiation of by arranging radiation detection elements with high density in the two-dimensional direction without lowering sensitivity thereof. CONSTITUTION:Grooves 8 are made grid rear surface P-type silicon substrate 14 to form plurality protrusions 13 two- dimensionally. A N layers 16 then formed on respective thus constituting photodiodes 23. Each is coated transparent insulating film 17 and negative electrode 18 order receive visible light emitted from scintillator 11.
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