作者: Edward C Spaulding
DOI:
关键词: Dielectric 、 Halogen 、 Bifunctional 、 Electromigration 、 Thermal stability 、 Silanes 、 Materials science 、 Silane 、 Substrate (electronics) 、 Organic chemistry 、 Chemical engineering
摘要: Halogen substituted paraxylylene dimers admixed with bifunctional silanes and vapor deposited on a substrate or used as an encapsulant produce dielectric films having improved adherence, resistance to electromigration, thermal stability.