Paraxylylene-silane dielectric films

作者: Edward C Spaulding

DOI:

关键词: DielectricHalogenBifunctionalElectromigrationThermal stabilitySilanesMaterials scienceSilaneSubstrate (electronics)Organic chemistryChemical engineering

摘要: Halogen substituted paraxylylene dimers admixed with bifunctional silanes and vapor deposited on a substrate or used as an encapsulant produce dielectric films having improved adherence, resistance to electromigration, thermal stability.