Electrostatic forces in fixed-fixed microbeams under direct and fringing field effects
作者： Prashant N. Kambali , Ashok Kumar Pandey
DOI: 10.1109/ICEMELEC.2014.7151140
关键词: Nanoelectromechanical systems 、 Electronic engineering 、 Materials science 、 Finite element method 、 Electrode 、 Mechanics 、 Capacitance 、 Field (physics) 、 Beam (structure) 、 Microelectromechanical systems 、 Electrostatics
摘要: We propose simple approximate expressions for capacitance and electrostatic force fixed-fixed beam-based MEMS/NEMS devices subjected to direct fringing field effects. The configuration that are considered study beam bottom electrode, side a combination of beam, electrode electrode. evaluated based on the numerical result obtained using FEA analysis in COMSOL software. accuracy proposed formulae is compared with available literature. this paper valid wide operating range they can also be used array applications.
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