Piezoresistive silicon thin film sensor array for biomedical applications
作者： P. Alpuim , V. Correia , E.S. Marins , J.G. Rocha , I.G. Trindade
DOI: 10.1016/J.TSF.2011.01.300
关键词: Ohmic contact 、 Piezoresistive effect 、 Sensor array 、 Flexible electronics 、 Materials science 、 Optoelectronics 、 Nanocrystalline silicon 、 Thin film 、 Reactive-ion etching 、 Gauge factor
摘要: Abstract N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor − 28, were deposited on rugged and flexible polyimide foils by Hot-wire chemical vapor deposition using a tantalum filament heated to 1750 °C. The piezoresistive response under cyclic quasi-static dynamical (up 100 Hz) load conditions is reported. Test structures, consisting of microresistors having lateral dimensions in the range from 50 100 μm thickness 120 nm defined an array reactive ion etching. Metallic pads, forming ohmic contacts sensing elements, lift-off process. A readout circuit for mutiplexer each row column matrix proposed. digital data will be processed, interpreted stored internally ultra low-power micro controller, also responsible communication two-way wireless data, e.g. inside outside human body.
core.ac.uk
harvard.edu
elsevier.com
sci-hub.se 参考文章(9)
Charles S. Smith, Piezoresistance Effect in Germanium and Silicon Physical Review. ,vol. 94, pp. 42- 49 ,(1954) , 10.1103/PHYSREV.94.42
Shoji Nishida, Makoto Konagai, Kiyoshi Takahashi, Piezoresistive Effect of Hydrogenated Microcrystalline Silicon Prepared by Plasma- and Photo-Chemical Vapor Deposition Japanese Journal of Applied Physics. ,vol. 25, pp. 17- 21 ,(1986) , 10.1143/JJAP.25.17
J. Bartholomeyczik, S. Brugger, P. Ruther, O. Paul, Multidimensional CMOS in-plane stress sensor IEEE Sensors Journal. ,vol. 5, pp. 872- 882 ,(2005) , 10.1109/JSEN.2005.853600
J. P. Conde, P. Brogueira, V. Chu, Amorphous and microcrystalline silicon films obtained by hot-wire chemical vapour deposition using high filament temperatures between 1900 and 2500°C Philosophical Magazine Part B. ,vol. 76, pp. 299- 308 ,(1997) , 10.1080/01418639708241095
W. G. Pfann, R. N. Thurston, Semiconducting Stress Transducers Utilizing the Transverse and Shear Piezoresistance Effects Journal of Applied Physics. ,vol. 32, pp. 2008- 2019 ,(1961) , 10.1063/1.1728280
P. Alpuim, V. Chu, J.P. Conde, Piezoresistive sensors on plastic substrates using doped microcrystalline silicon IEEE Sensors Journal. ,vol. 2, pp. 336- 341 ,(2002) , 10.1109/JSEN.2002.804037
Alan Pugh, The art of electronics. 2nd edn: By Paul Horowitz and Winfield Hill. Pp. 1125. Cambridge University Presss. 1989. £29.95, US$49.50 Endeavour. ,vol. 14, pp. 99- ,(1990) , 10.1016/0160-9327(90)90081-2
Paul Horowitz, Winfield Hill, R. J. Rollefson, The Art of Electronics American Journal of Physics. ,vol. 58, pp. 702- 703 ,(1990) , 10.1119/1.16385
C. S. Smith, Piezoresistancc effect in germanium and silicon Physical Review D. ,vol. 94, pp. 42- 49 ,(1954)