Surface Modification and Mechanical Properties of Bulk Silicon
作者： Matthias Scherge , Juergen A. Schaefer
DOI: 10.1007/978-94-011-5050-7_39
关键词: Adhesion 、 Surface (mathematics) 、 Silicon 、 Planar 、 Adhesion force 、 Surface forces apparatus 、 Surface modification 、 Materials science 、 Composite material 、 Hydrophobic surfaces
摘要: Bulk silicon samples prepared with different surface chemistry (hydrophobic and hydrophilic) as well morphologies (polished corrugated) were subjected to friction adhesion tests using a novel micro-triboscopy tester. This tester allows the evaluation of planar curved in mN nN force range. The do not have be transparent can vary thickness size. Hydrophobic surfaces show lower but clear stick/slips experiments. In contrast, hydrophilic adhere stronger friction. Surface modification by geometric means revealed that application corrugated is most effective way reduce adhesion.
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