Amorphous silicon varactors as rf amplitude modulators and their application to acoustic ink printers

作者: Scott A. Elrod , Donald L. Smith

DOI:

关键词: Materials scienceAmorphous siliconCapacitorOptoelectronicsAmplitudeElectrical engineeringFabricationInkwell

摘要: Amorphous silicon (aSi) voltage-controlled, variable capacitors (varactors) are utilized as rf amplitude modulators, such for modulating the applied to an acoustic ink printhead. Large area fabrication processes employed vertically integrating these varactors with printheads or other devices.

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