Performing EELS at higher energy losses at both 80 and 200 kV

摘要: Abstract An overview of recent progress in high loss electron energy spectroscopy is presented. This covers the instrumental aspects how to best set up a scanning transmission microscope and post-column spectrometer combination provide performance, survey range results that are possible EELS with good setup, brief investigation current limitations imposed by mainstream detector technology. In first section, detailed consideration given coupling optics between spectrometer, effects on spectrum, need for refocusing, problems gun anodes some field emission designs. second absolute cross sections L edges 4d transition elements out, these used quantification two cases, extended fine structure beyond Si–K edge atomic investigation. The final section comprises an noise levels Rh L3 standard CCD comparison simulated shot noise, shows this case, RMS was 7 times worse than fundamental limit, illustrating clearly much improvement would be counting detectors.