Vertical arrays of nanofluidic channels fabricated without nanolithography
作者： Roman Sordan , Alessio Miranda , Floriano Traversi , Davide Colombo , Daniel Chrastina
DOI: 10.1039/B819520J
关键词: Biomolecule 、 Heterojunction 、 Confocal 、 Materials science 、 Microscope 、 Nanofluidics 、 Nanolithography 、 Etching (microfabrication) 、 Nanotechnology 、 Fluorescence
摘要: Vertical arrays of sealed nanofluidic channels, in which both cross-sectional dimensions are controllable down to 10 nm, were fabricated by selective side etching a SiGe heterostructure comprised layers alternating Ge fractions. Capillary filling these nanochannel with fluorescent dye solutions was investigated using confocal microscope. The feasibility nanochannels for size-based separation biomolecules demonstrated imaging aggregates tagged amyloid-beta peptide. ability integrate large number shows promise high throughput applications involving lab-on-a-chip systems.
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