Directly-Patternable Bi2O3 Nanoparticle for Polymer Nanocomposite Capacitor
作者： Ki-Hoon Son , Hong-Sub Lee
关键词: Spin coating 、 Materials science 、 Capacitance 、 Nanoparticle 、 Nanocomposite 、 Substrate (electronics) 、 Polyvinylidene fluoride 、 Polymer nanocomposite 、 Chemical engineering 、 Bismuth
摘要: A polyvinylidene fluoride (PVDF) film incorporating size-controlled, uniformly dispersed, directly patterned Bi2O3 nanoparticles was developed to achieve a high-k polymer nanocomposite capacitor. The photochemical metal-organic deposition (PMOD) method employed form dispersed and on the substrate. Bi were produced by spin coating Bismuth 2-ethylhexanoate solution Pt substrate with UV irradiation for 1, 4, 7, 10 min. average diameter of number per unit area (μm2) about 30, 70, 120 nm 31 particles/μm2 times min, respectively. In addition, capacitance PVDF could be controlled nanoparticle size. containing min able improve 1.4, 2.0, 2.7, 3.4 compared an as-prepared film. By using mask aligner, pattered substrate, which had 5 μm line width pattern, successfully defined demonstrated.
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