Low-Cost Microbolometer Type Infrared Detectors
作者： Le Yu , Yaozu Guo , Haoyu Zhu , Mingcheng Luo , Ping Han
DOI: 10.3390/MI11090800
关键词: Microbolometer 、 Microelectromechanical systems 、 Integrated circuit 、 Cardinal point 、 CMOS 、 Fabrication 、 Optoelectronics 、 Detector 、 Materials science 、 Pixel
摘要: The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. fabrication of CMOS-compatible focal plane arrays (IRFPAs) is based on combination standard CMOS process and simple post-CMOS micro-electro-mechanical system (MEMS) process. With technological development, performance commercialized microbolometers shows only small gap with that mainstream ones. This paper reviews basics recent advances IRFPAs in aspects pixel structure, read-out integrated circuit (ROIC), array, vacuum packaging.
mdpi.com
sci-hub.st 参考文章(76)
Paul W. Kruse, Uncooled Thermal Imaging Arrays, Systems, and Applications ,(2001)
A. Kennedy, P. Masini, M. Lamb, J. Hamers, T. Kocian, E. Gordon, W. Parrish, R. Williams, T. LeBeau, Advanced uncooled sensor product development Proceedings of SPIE. ,vol. 9451, ,(2015) , 10.1117/12.2177462
E. N. Grossman, J. M. Martinis, A. S. Kutyrev, C. A. Allen, Dominic J. Benford, J. A. Chervenak, R. A. Shafer, K. D. Irwin, C. D. Reintsema, S. H. Moseley, Superconducting Transition Edge Sensor Bolometer Arrays for Submillimeter Astronomy Eleventh International Symposium on Space Terahertz Technology. pp. 187- ,(2000)
E. Socher, Y. Sinai, Y. Nemirovsky, A low-cost CMOS compatible serpentine-structured polysilicon-based microbolometer array international conference on solid state sensors actuators and microsystems. ,vol. 1, pp. 320- 323 ,(2003) , 10.1109/SENSOR.2003.1215317
Charles M. Hanson, Howard R. Beratan, Robert A. Owen, Mac Corbin, S. McKenney, Uncooled thermal imaging at Texas Instruments SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation. ,vol. 1735, pp. 330- 339 ,(1992) , 10.1117/12.138624
Benoit Dupont, Patrick Robert, Antoine Dupret, Patrick Villard, David Pochic, Model based on-chip 13bits ADC design dedicated to uncooled infrared focal plane arrays Proceedings of SPIE, the International Society for Optical Engineering. ,vol. 6737, pp. 673712- ,(2007) , 10.1117/12.738318
G. Dumont, W. Rabaud, J.-J. Yon, L. Carle, V. Goudon, C. Vialle, Sébastien Becker, Antoine Hamelin, A. Arnaud, Current progress on pixel level packaging for uncooled IRFPA Infrared Technology and Applications XXXVIII. ,vol. 8353, ,(2012) , 10.1117/12.919918
Wenjing Jiang, Wen Ou, Anjie Ming, Zhanfeng Liu, Xinwei Zhang, Design and analysis of a high fill-factor SOI diode uncooled infrared focal plane array Journal of Micromechanics and Microengineering. ,vol. 23, pp. 065004- ,(2013) , 10.1088/0960-1317/23/6/065004
Mike V. Mansi, Martin Brookfield, Stephen G. Porter, Ivan Edwards, Brendon Bold, John Shannon, Paul Lambkin, Alan Mathewson, AUTHENTIC: a very low-cost infrared detector and camera system International Symposium on Optical Science and Technology. ,vol. 4820, pp. 227- 238 ,(2003) , 10.1117/12.451051
Marc C. Foote, Stephen D. Gaalema, Progress toward high-performance thermopile imaging arrays Proceedings of SPIE. ,vol. 4369, pp. 350- 354 ,(2001) , 10.1117/12.445337