Position Control of MEMS
作者： Michael S.-C. Lu
DOI: 10.1007/978-1-4419-5832-7_7
关键词: Miniaturization 、 Linear-quadratic-Gaussian control 、 Phase margin 、 Microelectromechanical systems 、 Proof mass 、 Actuator 、 Electronic engineering 、 Voice coil 、 Bandwidth (signal processing) 、 Computer science
摘要: The miniaturization of actuators by microelectromechanical systems (MEMS) allows an increased mechanical bandwidth that can be utilized for improving response speed and control accuracy. MEMS also brings new problems, such as electrostatic microactuators, to inspire both the communities work together. This chapter will present recent developments feedback from perspectives application, design method, implementation.
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