Configured-hole high-speed drilling system for micro-via pattern formation, and resulting structure

摘要: Economical production of configured, laser-drilled, high-precision, ultra-miniature multiple-via-hole patterns is accomplished by multiplexing the homogenized, shaped, nearly-collimated output one or more high-power excimer lasers into a set beamlines, differently configured at different depths through thickness substrate. A substrate delivery subsystem provides continuous supply film strips segments, which may be blanks intermediates. Various stencils in mask provide cup-shaped partial hole, subsequently provided with mating stem hole. Each portion each hole laser-drilled bottom cup from either above below to form via-hole desired configuration, such as stem-glass (or cup/funnel), for multi-micro-via-hole arrays filtering forming clog-resistant aerosol nozzles. Parameter changes both duration and focus substitute effect configuration contrasted configuration.