Fabrication of single-walled carbon nanotube-based highly sensitive gas sensors

作者: Ke Xu , XiaoJun Tian , ChengDong Wu , Jian Liu , MengXin Li

DOI: 10.1007/S11431-012-5054-8

关键词: Materials scienceAnalytical chemistryElectrical resistance and conductanceElectric fieldMicroelectrodeCarbon nanotubeField-effect transistorGas detectorScanning electron microscopeDielectrophoresisOptoelectronics

摘要: A highly sensitive single-walled carbon nanotube (SWCNT)-based ammonia (NH3) gas detector is manufactured by orderly assembling SWCNT using the dielectrophoretical (DEP) technology. Atom force microscopy (AFM) and scanning electron (SEM) images revealed that SWCNTs were assembled between microelectrodes. affected electrophoretic which was carried out related theoretical analysis in a nonuniform electric field. The field effect transistors geometry obtained. electrical performance of NH3 sensor with tested before after adoption at room temperature. Experimental results indicated efficient assembly obtained applied alternating current voltage frequency 2 MHz amplitude 10 V. SWCNTs-based had high sensitivity to NH3, conductance reduced two times interaction NH3. surface molecules removed means ultraviolet ray irradiation for min. Hence, fabricated could be reversible. There clear evidence adsorption on channel easy realized. Our are consistent recent experiments.

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