Slurry delivery arm
作者： Alexander S. Polyak , Avi Tepman
DOI:
关键词: Engineering drawing 、 Tube (fluid conveyance) 、 Mechanical engineering 、 Pinch valve 、 Slurry 、 Computer science
摘要: A polishing fluid delivery apparatus has been provided that in one embodiment includes a support member, dispense arm, tube and variable restricting device. The arm extends from an upper portion of the member outlet coupled thereto. device interfaces with is adapted to provide restriction flow passing through tube. In another embodiment, pinch valve continuous beyond valve. yet position controllable.
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