Strain effects on highly strained InAsP/InGaP multi-quantum well structures grown by MOVPE using TBAs and TBP

作者: Roberta Campi , Simone Codato , Domenico Soldani , None

DOI: 10.1016/J.JCRYSGRO.2004.02.093

关键词: OptoelectronicsFabricationQuantum well laserQuantum wellLaserEtching (microfabrication)Metalorganic vapour phase epitaxyPhotoluminescenceHeterojunctionOptics

摘要: This thesis investigates different material systems and processing technology for high temperature compatible laser diodes used in volume applications within the 1.3-μm telecom wavelength window. Laser built from such materials are much desired order to eleminate need active control needed current systems, which significantly increases both complexity, size cost. The structures were grown by Metal-Organic Chemical Vapor Deposition (MOCVD) evaluation of was performed using characterization methods as High-Resolution X-Ray Diffraction (HR-XRD), Photoluminescence (PL), Time-Resolved (TR-PL). Fabrication Fabry-Perot lasers with geometries check quality performance. A novel in-situ etching technique developed use i future more advanced, buried hetrostructure lasers. first studied system AlGaInAsP/InGaAsP/InP. To handle a 5-element precision required, modelling heterostructure properties performed. addition Al InGaAsP barrier allows better electron confinement little change valence band properties. optimum aluminium content found be about 12%. Although effect could identified, it not sufficient T0 only 90 K up 60 °C. second InGaP/InAsP/ InP initially looked quite promising quantum well design point view but encountered severe problems device integration further work discontinued. main effort therefore devoted third system: AlGaInAs/AlGaInAs/InP. is unknown has hitherto widespread application fibre optic applications. In this work, MOCVD growth 1.3 μ;m optimized ridge waveguide devices excellent performance fabricated (T0 = 97 at 85 °C). identified suitable structure since requires single epitaxial growth, thus avoiding problem oxidation based structures. dynamic 110 °C fabrication highly reliable (lifetime >7000 h). yield uncooled process now been transferred production applied short length 10 Gb/s multimode links. improve usefulness Al-containing even higher developments towards fully geometry also pursued. overcome difficulty containing layers mesa walls an implemented. Different chemistry approaches investigated results reported.

参考文章(22)
Matsuyuki Ogasawara, Hideo Sugiura, Manabu Mitsuhara, Mitsuo Yamamoto, Masashi Nakao, Influence of net strain, strain type, and temperature on the critical thickness of In(Ga)AsP-strained multi quantum wells Journal of Applied Physics. ,vol. 84, pp. 4775- 4780 ,(1998) , 10.1063/1.368719
U. Bangert, A.J. Harvey, V.A. Wilkinson, C. Dieker, J.M. Jowett, A.D. Smith, S.D. Perrin, C.J. Gibbins, Evidence for strain relaxation via composition fluctuations in strained quaternary / quaternary and quaternary / ternary multiple quantum well structures Journal of Crystal Growth. ,vol. 132, pp. 231- 240 ,(1993) , 10.1016/0022-0248(93)90267-Z
Chong-Yi Lee, Meng-Chyi Wu, Ya-De Tian, Wei-Han Wang, Wen-Jeng Ho, Tian-Tsorng Shi, Effects of rapid thermal annealing on InAsP/InP strained multiquantum well laser diodes grown by metal organic chemical vapour deposition Electronics Letters. ,vol. 36, pp. 1026- 1028 ,(2000) , 10.1049/EL:20000761
D.J. Dunstan, Measurement and interpretation of strain by high-resolution X-ray diffraction Applied Surface Science. ,vol. 188, pp. 69- 74 ,(2002) , 10.1016/S0169-4332(01)00703-6
A. Kasukawa, N. Yamanaka, N. Yokouchi, N. Iwai, Very low threshold current density 1.3 /spl mu/m InAsP/InP/InGaP/InP/GaInAsP strain-compensated multiple quantum well lasers Electronics Letters. ,vol. 31, pp. 1749- 1750 ,(1995) , 10.1049/EL:19951223
D. C. Houghton, M. Davies, M. Dion, Design criteria for structurally stable, highly strained multiple quantum well devices Applied Physics Letters. ,vol. 64, pp. 505- 507 ,(1994) , 10.1063/1.111111
U. Bangert, A.J. Harvey, C. Dieker, H. Hardtdegen, Nucleation of wavy growth modes in quantum well stacks of III–V compound alloys Journal of Crystal Growth. ,vol. 152, pp. 115- 126 ,(1995) , 10.1016/0022-0248(94)01012-9
Akihiko Kasukawa, Noriyuki Yokouchi, Nobumitsu Yamanaka, Norihiro Iwai, Takeyoshi Matsuda, InAsP/InGaP All-Ternary Strain-Compensated Multiple Quantum Wells and Their Application to Long-Wavelength Lasers Japanese Journal of Applied Physics. ,vol. 34, ,(1995) , 10.1143/JJAP.34.L965