Solution Processing and Resist-Free Nanoimprint Fabrication of Thin Film Chalcogenide Glass Devices: Inorganic-Organic Hybrid Photonic Integration

摘要: Organic polymer materials are widely credited with extreme versatility for thin film device processing. However, they generally lack the high refractive indices of inorganic semiconductors essential tight optical confinement in planar integrated photonic circuits. Inorganic–organic hybrid systems overcome these limits by combining both types materials, although such integration remains challenging given vastly different properties two materials. In this paper, a new approach is used to realize inorganic–organic photonics using chalcogenide glass (ChG) Known as an amorphous semiconductor, possesses indices, and can be prepared form through solution deposition patterned via direct thermal nanoimprinting, processing methods traditionally exclusive only. Sub-micrometer waveguides, microring resonators, diffraction gratings fabricated from processed (SP) ChG films monolithically organic substrates create mechanically flexible, high-index-contrast devices. The resonators exhibit quality factor (Q-factor) 80 000 near 1550 nm wavelength. Free-standing, flexible whose readily tailored conformal on nonplanar surfaces also demonstrated.