Template for room temperature, low pressure micro- and nano-imprint lithography

摘要: Described are imprint lithography templates, methods of forming and using the a template holder device. An may include body with plurality recesses on surface body. The be material that is substantially transparent to activating light. At least portion define features having feature size less than about 250 nm. A formed by obtaining light or template. In some embodiments, further at one alignment mark. gap sensing area. used form an imprinted layer in curable liquid disposed substrate. During use, within holder. opening configured receive template, support plate, piezo actuator coupled alter physical dimension during use.