Application of pyrosol deposition process for large-area deposition of fluorine-doped tin dioxide thin films
作者： Joydeep Dutta , Pierre Roubeau , Thierry Emeraud , Jean-Marc Laurent , Agnès Smith
DOI: 10.1016/0040-6090(94)90122-8
关键词: Carbon film 、 Fluorine 、 Doping 、 Epitaxy 、 Thin film 、 Chemical engineering 、 Analytical chemistry 、 Tin dioxide 、 Combustion chemical vapor deposition 、 Deposition (phase transition) 、 Chemistry
摘要: Application of pyrosol deposition process for large-area fluorine-doped tin dioxide thin films
elsevier.com
sci-hub.se 参考文章(11)
Joydeep Dutta, Swati Ray, None, Variations in structural and electrical properties of magnetron-sputtered indium tin oxide films with deposition parameters Thin Solid Films. ,vol. 162, pp. 119- 127 ,(1988) , 10.1016/0040-6090(88)90200-3
W.J. DeSisto, Y-T. Qian, C. Hannigan, J.O. Edwards, R. Kershaw, K. Dwight, A. Wold, Preparation and characterization of alumina films prepared by a novel spray pyrolysis method Materials Research Bulletin. ,vol. 25, pp. 183- 189 ,(1990) , 10.1016/0025-5408(90)90044-3
W. A. Bryant, The fundamentals of chemical vapour deposition Journal of Materials Science. ,vol. 12, pp. 1285- 1306 ,(1977) , 10.1007/BF00540843
E. Shanthi, A. Banerjee, V. Dutta, K. L. Chopra, Electrical and optical properties of tin oxide films doped with F and (Sb+F) Journal of Applied Physics. ,vol. 53, pp. 1615- 1621 ,(1982) , 10.1063/1.330619
J.C. Manifacier, Thin metallic oxides as transparent conductors Thin Solid Films. ,vol. 90, pp. 297- 308 ,(1982) , 10.1016/0040-6090(82)90381-9
Geeta Sanon, Raj Rup, Abhai Mansingh, Growth and characterization of tin oxide films prepared by chemical vapour deposition Thin Solid Films. ,vol. 190, pp. 287- 301 ,(1990) , 10.1016/0040-6090(89)90918-8
Gérard Blandenet, Michel Court, Yves Lagarde, Thin layers deposited by the pyrosol process Thin Solid Films. ,vol. 77, pp. 81- 90 ,(1981) , 10.1016/0040-6090(81)90362-X
H De Waal, F Simons, Tin oxide coatings: Physical properties and applications Thin Solid Films. ,vol. 77, pp. 253- 258 ,(1981) , 10.1016/0040-6090(81)90380-1
K.L. Chopra, S. Major, D.K. Pandya, Transparent conductors—A status review Thin Solid Films. ,vol. 102, pp. 1- 46 ,(1983) , 10.1016/0040-6090(83)90256-0
R Pommier, C Gril, J Marucchi, Sprayed films of indium tin oxide and fluorine-doped tin oxide of large surface area Thin Solid Films. ,vol. 77, pp. 91- 98 ,(1981) , 10.1016/0040-6090(81)90363-1