Modeling of a piezoelectric fluid sensor excited by lateral fields using a spectral domain approach
作者： Thomas Voglhuber–Brunnmaier , Bernhard Jakoby
DOI: 10.1016/J.PROENG.2010.09.053
关键词: Piezoelectricity 、 Resonator 、 Electrode 、 Spectral domain 、 Conductivity 、 Materials science 、 Optics 、 Computational physics 、 Finite element method 、 Excited state 、 Wavenumber
摘要: Abstract Piezoelectric discs excited by lateral fields (LFE; both electrodes are placed on one side of the disc) show unique differences compared to common thickness field (TFE) resonators, in particular when they used for liquid sensing. In this contribution LFE-sensor setup is modeled as a layered structure spectral (wavenumbers) domain utilizing semi-numerical approach. interaction piezo-disc and sample liquid, which too complex analytical methods comprehensive FEM, effciently method. The calculation frequency responses well electrical mechanical illustrated simulated setup. simulation results obtained from Christoffel–Bechmann formalism, sensitivities fluid parameters like viscosity conductivity shown.
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Arnold Sommerfeld, Partial Differential Equations in Physics ,(1949)
Joel F. Rosenbaum, Bulk Acoustic Wave Theory and Devices ,(1988)
Roman Beigelbeck, Bernhard Jakoby, A two-dimensional analysis of spurious compressional wave excitation by thickness-shear-mode resonators Journal of Applied Physics. ,vol. 95, pp. 4989- 4995 ,(2004) , 10.1063/1.1697637
R. H. Wittstruck, N. W. Emanetoglu, Y. Lu, Sally Laffey, Arthur Ballato, Properties of transducers and substrates for high frequency resonators and sensors Journal of the Acoustical Society of America. ,vol. 118, pp. 1414- 1423 ,(2005) , 10.1121/1.1985076
Bernhard Weiss, Erwin K. Reichel, Bernhard Jakoby, Modeling of a clamped–clamped beam vibrating in a fluid for viscosity and density sensing regarding compressibility Sensors and Actuators A-physical. ,vol. 143, pp. 293- 301 ,(2008) , 10.1016/J.SNA.2007.11.029
B Jakoby, Efficient semi-numerical analysis of acoustic sensors using spectral domain methods—a review Measurement Science and Technology. ,vol. 19, pp. 052001- ,(2008) , 10.1088/0957-0233/19/5/052001
Yihe Hu, L.A. French, K. Radecsky, M. Pereira da Cunha, P. Millard, J.F. Vetelino, A lateral field excited liquid acoustic wave sensor ieee symposium on ultrasonics. ,vol. 51, pp. 1373- 1380 ,(2003) , 10.1109/TUFFC.2004.1367475
S.J. Martin, K.O. Wessendorf, C.T. Gebert, G.C. Frye, R.W. Cernosek, L. Casaus, M.A. Mitchell, Measuring liquid properties with smooth- and textured-surface resonators international frequency control symposium. pp. 603- 608 ,(1993) , 10.2172/139545
K.C. Wagner, G. Kovacs, A.R. Baghai-Wadji, F. Seifert, Interdigital Transducer Interaction with SAWS and BAWS internaltional ultrasonics symposium. pp. 149- 154 ,(1987) , 10.1109/ULTSYM.1987.198944
J.R. Vig, R.L. Filler, Y. Kim, Chemical sensor based on quartz microresonators IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 5, pp. 138- 140 ,(1996) , 10.1109/84.506202