Electron spectroscopic imaging: parallel energy filtering and microanalysis in the fixed-beam electron microscope.

摘要: A new imaging modality in electron microscopy uses energy filtration to produce micrographs with elastically scattered electrons or that have lost a specific, often characteristic amount of interacting the specimen. No deleterious effects on microscope performance are encountered. Instead, microanalysis specimens is made possible spatial resolution 3 5 and sensitivity detection 2 × 10−21 g corresponding about 50 atoms phosphorus. Elements detected range from hydrogen (Z = 1) uranium 92). Examples elemental mapping show membrane structure, DNA within nucleosomes, RNA ribosomal particles.