CVD-processes by hollow cathode glow discharge
作者： A. Hellmich , T. Jung , A. Kielhorn , M. Rißland
DOI: 10.1016/S0257-8972(97)00299-5
关键词: Deposition (phase transition) 、 Analytical chemistry 、 Materials science 、 Plasma-enhanced chemical vapor deposition 、 Plasma 、 Glow discharge 、 Thin film 、 Amorphous carbon 、 Cathode 、 Chemical vapor deposition
摘要: … we found a correlation between the adherence and the oxygen concentration in the metal layer. Using appropriate deposition conditions. the oxygen content in the films was below 0.2 at…
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sci-hub.se 参考文章(8)
F. Jansen, J. Mort, Plasma deposited thin films pdtf. ,(1986)
T. Jung, A. Westphal, High rate deposition of alumina films by reactive gas flow sputtering Surface & Coatings Technology. ,vol. 59, pp. 171- 176 ,(1993) , 10.1016/0257-8972(93)90078-3
V I Kolobov, L D Tsendin, Analytic model of the hollow cathode effect Plasma Sources Science and Technology. ,vol. 4, pp. 551- 560 ,(1995) , 10.1088/0963-0252/4/4/006
A. von Keudell, W. Möller, R. Hytry, Deposition of dense hydrocarbon films from a nonbiased microwave plasma Applied Physics Letters. ,vol. 62, pp. 937- 939 ,(1993) , 10.1063/1.108525
Kiyoshi Ishii, High‐rate low kinetic energy gas‐flow‐sputtering system Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 7, pp. 256- 258 ,(1989) , 10.1116/1.576129
K. Taube, M. Grischke, K. Bewilogua, Improvement of carbon-based coatings for use in the cold forming of non-ferrous metals Surface & Coatings Technology. pp. 662- 668 ,(1994) , 10.1016/0257-8972(94)90234-8
M.C.M. van de Sanden, R.J. Severens, R.F.G. Meulenbroeks, M.J. de Graaf, Z. Qing, D.K. Otorbaev, R. Engeln, J.W.A.M. Gielen, J.A.M. van der Mullen, D.C. Schram, The role of hydrogen during plasma beam deposition of amorphous thin films Surface and Coatings Technology. ,vol. 74-75, pp. 1- 9 ,(1995) , 10.1016/0257-8972(95)08356-1
M.D. Bentzon, K. Mogensen, J. Bindslev Hansen, C. Barholm-Hansen, C. Tr˦holt, P. Holiday, S.S. Eskildsen, Metallic interlayers between steel and diamond-like carbon Surface & Coatings Technology. pp. 651- 655 ,(1994) , 10.1016/0257-8972(94)90232-1