作者: Heinz Dr. Schicht , Uwe Schmidt , Gerhard Ditzel , Wilfried Kaiser , Valentino Dr. Villari
DOI:
关键词: Coating 、 Oxide 、 Dielectric 、 Layer (electronics) 、 Alloy 、 Substrate (electronics) 、 Optics 、 Zinc 、 Composite material 、 Sputtering 、 Materials science
摘要: A transparent substrate, especially of glass, has a silicon-containing aluminium-doped zinc oxide layer located directly below an IR reflective silver its low emissive or solar control multilayer coating which includes lower and upper semiconductor metal compound dielectric anti-reflective layers, the blocking metal, alloy their sub-stoichiometric on layer. Preferably, ZnO Al:Si ratio 12-1:1, 3.0-1.8:1. Also claimed is production above in Al- Si-doped deposited by reactive cathodic sputtering from target containing 0.3-8 (preferably 1.2) wt.% Al 0.05-1 0.1) Si.