Soft x-ray nanobeam formed by an ellipsoidal mirror
作者： Yoko Takeo , Akihiro Suzuki , Hiroto Motoyama , Yoshinori Takei , Takehiro Kume
DOI: 10.1063/1.5144932
关键词: Beam (structure) 、 Photon 、 Materials science 、 Focus (optics) 、 Beamline 、 Ptychography 、 Fabrication 、 Root mean square 、 Optics 、 Microscopy
摘要: Ellipsoidal mirrors are promising optical devices for soft x-ray focusing. A fabrication process consisting of master and replication has been developed to produce ellipsoidal with wide apertures approximately 10 mm. In the present study, focusing performance an mirror was evaluated using x-rays in beamline BL25SU-a SPring-8. The focus sizes were measured at photon energies 300, 400, 500 eV. quantitative figure error also by analyzing wavefield focused beam retrieved ptychography. distributions different agreed each other a root mean square level 1 nm. system can be used various types microscopy, allowing use range energies.
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