Transient Analysis of TSV Equivalent Circuit Considering Nonlinear MOS Capacitance Effects

作者: Stefano Piersanti , Francesco de Paulis , Antonio Orlandi , Madhavan Swaminathan , Vittorio Ricchiuti

DOI: 10.1109/TEMC.2015.2414477

关键词: Materials scienceTransient analysisTransient voltage suppressorCapacitanceNonlinear systemEquivalent circuitSiliconElectric potentialElectronic engineeringOptoelectronicsDoping

摘要: An equivalent circuit model for the transient analysis of through-silicon vias (TSV) taking into account nonlinear metal–oxide–semiconductor effects is proposed. The takes behavior doped silicon substrate in presence electric potential difference due to voltage between TSVs. impact time-variant capacitance via and on crosstalk signal propagation analyzed.

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