Mechanics of microelectromechanical systems
作者： Nicolae Lobontiu , Ephrahim Garcia
DOI:
关键词: Nanotechnology 、 Microelectromechanical systems 、 Scaling 、 Stiffness 、 Microfabrication 、 Static response 、 Materials science
摘要: Stiffness Basics.- Microcantilevers, Microhinges, Microbridges.- Microsuspensions.- Microtransduction: Actuation and Sensing.- Static Response of Mems.- Microfabrication, Materials, Precision Scaling.
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