Mesoporous Thin-Film on Highly-Sensitive Resonant Chemical Sensor for Relative Humidity and CO2 Detection
作者： Hyunjoo J. Lee , Kwan Kyu Park , Mario Kupnik , Nicholas A. Melosh , Butrus T. Khuri-Yakub
DOI: 10.1021/AC300225C
关键词: Mesoporous material 、 Volume (thermodynamics) 、 Mesoporous silica 、 Chemistry 、 Analytical chemistry 、 Water vapor 、 Resolution (mass spectrometry) 、 Layer (electronics) 、 Relative humidity 、 Thin film
摘要: Distributed sensing of gas-phase chemicals is a promising application for mesoporous materials when combined with highly sensitive miniaturized gas sensors. We present direct silica thin film on resonant chemical sensor mass sensitivity at the zeptogram scale relative humidity and CO2 detection. Using thin-film, we report one lowest volume resolutions detection 5.1 × 10–4% RH/Hz to water vapor in N2, which 70 times higher than device nontemplated layer. In addition, thin-film that functionalized an amino-group directly applied sensor, exhibits 1.6 10–4%/Hz resolution 1.82 N2.
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