Microfabrication of thermoelectric generators on flexible foil substrates as a power source for autonomous microsystems
作者： Wenmin Qu , Matthias Plötner , Wolf-Joachim Fischer
DOI: 10.1088/0960-1317/11/2/310
关键词: Nanotechnology 、 Photoresist 、 Fabrication 、 Surface micromachining 、 FOIL method 、 Microfabrication 、 Materials science 、 Isotropic etching 、 Thermoelectric generator 、 Energy source 、 Mechanical engineering 、 Electrical and Electronic Engineering 、 Mechanics of Materials 、 Electronic, Optical and Magnetic Materials
摘要: A flexible thermoelectric generator with overall dimensions of 16×20×0.05 mm has been fabricated using a unique low-cost procedure as part our ongoing research efforts on developing economical and reliable energy sources for autonomous microsystems. The consists multiplicity micro Sb-Bi thermocouple strips embedded in 50 µm thick epoxy film is capable generating voltage 0.25 V at temperature difference 30 K. Its fabrication involves only few steps, such foil lithography, electroplating, embedding wet chemical etching. exposure aqueous photoresist substrates carried out specially constructed mask aligner by Karl Suss GmbH. strips, cross section 40×10 length 20 mm, are electroplated galvanostatically from their associated acidic electrolytes into the patterned AZ 111XFS template copper foil. After top-over embedment structures an film, original substrate removed completely etching, leaving module to be film. This process proven cost-effective, easily manageable highly reliable. It now being applied current more efficient generators based n- p-type Bi2Te3 compound materials.
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sci-hub.se 参考文章(5)
L. Huang, W. Wang, M. C. Murphy, Microfabrication of high aspect ratio Bi–Te alloy microposts and applications in micro-sized cooling probes Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 6, pp. 1- 5 ,(1999) , 10.1007/S005420050165
T. I. Quickenden, Y. Mua, A Review of Power Generation in Aqueous Thermogalvanic Cells Journal of The Electrochemical Society. ,vol. 142, pp. 3985- 3994 ,(1995) , 10.1149/1.2048446
Toshitaka Ohta, Takenobu Kajikawa, Yukinobu Kumashiro, Characteristics of (Bi, Sb)2 (Te, Se)3-based thick-film thermoelectric elements for power generation Electrical Engineering in Japan. ,vol. 110, pp. 14- 23 ,(1989) , 10.1002/EEJ.4391100402
Wenmin Qu, C. Wenzel, A. Jahn, D. Zeidler, UV-LIGA: a promising and low-cost variant for microsystem technology conference on optoelectronic and microelectronic materials and devices. pp. 380- 383 ,(1998) , 10.1109/COMMAD.1998.791668
Hanno Schaumburg, Einführung in die Werkstoffe der Elektrotechnik Vieweg+Teubner Verlag. ,(1993) , 10.1007/978-3-322-96725-1