Particle Beams: Sources, Optics, and Interactions
作者： Ivor Brodie , Julius J. Muray
DOI: 10.1007/978-1-4899-2160-4_2
关键词: Beam (structure) 、 Particle 、 Diffraction 、 Optics 、 Physics 、 Ion 、 Particle beam 、 Electron 、 Photon 、 Wavelength
摘要: A key element in our ability to view, fabricate, and some cases operate microdevices has been the availability of tightly focused particle beams, particularly photons, electrons, ions. Consideration diffraction effects leads general rule that if one wishes focus a beam particles into spot given size, wavelength associated with must be less than required diameter. In Table 1 are listed wavelengths (in μm) three (photons, protons) at various energies.
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