作者: Bogdan I. Epureanu
DOI:
关键词: Film structure 、 Excitation 、 Acoustics 、 Test structure 、 Electronic engineering 、 Control theory 、 Engineering 、 Control signal 、 Piezoelectricity
摘要: An excitation system includes a pair of piezoelectric elements configured to apply respective forces test structure, clamp including an adjustable arm, the arm being capture structure between elements, controller coupled and generate control signal for each element, such that are matched one another, sensor film structures output signals indicative applied disposed structure.