Porous Silicon Oxide Layer Formation by the Electrochemical Treatment of a Porous Silicon Layer

作者: M. Yamana , N. Kashiwazaki , A. Kinoshita , T. Nakano , M. Yamamoto

DOI: 10.1149/1.2087100

关键词: OxideElectrochemistryChemical engineeringPorous siliconLayer (electronics)Oxide thin-film transistorChemistryAnalytical chemistry

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