System for controlling introduction of a reducing agent to a liquid stream

作者: Bruce Lee Coulter

DOI:

关键词: DegasificationInorganic chemistryAmmonium persulfateReducing agentScavengingUltrapure waterIon exchangeChemistry

摘要: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The treated by utilizing a free radical scavenging removal system. can utilize actinic radiation with precursor compound, such as ammonium persulfate. comprise use reducing agent. may be further ion exchange media degasification apparatus. control utilized to regulate addition the intensity radiation, agent water.