作者: Bruce Lee Coulter
DOI:
关键词: Degasification 、 Inorganic chemistry 、 Ammonium persulfate 、 Reducing agent 、 Scavenging 、 Ultrapure water 、 Ion exchange 、 Chemistry
摘要: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The treated by utilizing a free radical scavenging removal system. can utilize actinic radiation with precursor compound, such as ammonium persulfate. comprise use reducing agent. may be further ion exchange media degasification apparatus. control utilized to regulate addition the intensity radiation, agent water.