Sequential measurement strategy for wafer geometric profile estimation
作者： Ran Jin , Chia-Jung Chang , Jianjun Shi
DOI: 10.1080/0740817X.2011.557030
关键词: Mean squared prediction error 、 Quality management 、 Feature estimation 、 Flatness (systems theory) 、 Semiconductor industry 、 Algorithm 、 Gaussian process 、 Wafer 、 Reliability engineering 、 Engineering 、 Ensure (product)
摘要: … measurement strategy to reduce the number of samples measured in wafers while still … However, a major limitation of these sampling strategies is that the local spatial variability in …
sci-hub.se 参考文章(42)
Arnaud Doucet, Nando de Freitas, Neil J. Gordon, Sequential Monte Carlo in Practice ,(2001)
Josef Hoschek, Dieter Lasser, Scattered Data Interpolation Vieweg+Teubner Verlag. pp. 368- 411 ,(1992) , 10.1007/978-3-322-89829-6_9
Thomas J. Santner, William I. Notz, Brian Jonathan Williams, Sequential design of computer experiments to minimize integrated response functions The Ohio State University. ,(2000)
Sequential Monte Carlo methods in practice Springer. ,(2001) , 10.1007/978-1-4757-3437-9
Simon J. Godsill, Arnaud Doucet, Christophe Andrieu, On sequential simulation-based methods for Bayesian filtering Statistics and Computing. ,(1998)
Matthias Schonlau, William J. Welch, Donald R. Jones, Global versus local search in constrained optimization of computer models Institute of Mathematical Statistics. pp. 11- 25 ,(1998) , 10.1214/LNMS/1215456182
Hans Bruun Nielsen, Søren Nymand Lophaven, Jacob Søndergaard, DACE - A Matlab Kriging Toolbox ,(2002)
P.J. Curran, H.D. Williamson, Simple size for ground and remotely sensed data Remote Sensing of Environment. ,vol. 20, pp. 31- 41 ,(1986) , 10.1016/0034-4257(86)90012-X
D. Huang, T. T. Allen, W. I. Notz, R. A. Miller, Sequential kriging optimization using multiple-fidelity evaluations Structural and Multidisciplinary Optimization. ,vol. 32, pp. 369- 382 ,(2006) , 10.1007/S00158-005-0587-0
Babur Ozcelik, Mahmut Bayramoglu, The statistical modeling of surface roughness in high-speed flat end milling International Journal of Machine Tools & Manufacture. ,vol. 46, pp. 1395- 1402 ,(2006) , 10.1016/J.IJMACHTOOLS.2005.10.005