作者： T. A. Sinel'nikova , N. M. Pavlov , V. V. Azatyan , R. G. Aivazyan
DOI:
关键词: Germane 、 Infrared spectroscopy 、 Chemistry 、 Kinetics 、 Stereochemistry 、 Analytical chemistry 、 Concentration effect 、 Pyrolysis 、 Decomposition 、 Thermal decomposition 、 Torr
摘要: The thermal decomposition of monogermane at 420-470 K and 1-70 torr on various surfaces under static conditions was studied. concentration GeH 4 from IR absorbtion spectra the mixture pressure were recorded during reaction. spectrum Ge, yielding form a semiconductor film, investigated. It established that proceeds by an unbranched-chain mechanism. autoaccelerated process caused participation adsorbed intermediate particles in chain development revealed. inhibition realized